Sixty nine could only be reproduced by Monte Carlo simulations if a superposition of two reactions was assumed, i.e., (i) combustion reactions of O radicals with adsorbed TMA molecules in the vicinity of the doorway of the hole leading to CO2 and H2O as reaction solutions and (ii) a secondary https://aldmaterials93692.bloguetechno.com/rumored-buzz-on-atomic-layer-deposition-54662171